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Low-Cost PVD Shadow Masks with Submillimeter Resolution from Laser-Cut Paper
We characterize an affordable method of producing stencils for submillimeter physical vapor deposition (PVD) by using paper and a benchtop laser cutter. Patterning electrodes or similar features on top of organic or biological substrates is generally not possible using standard photolithography. Sha...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407583/ https://www.ncbi.nlm.nih.gov/pubmed/32664500 http://dx.doi.org/10.3390/mi11070676 |