Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form...

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Detalles Bibliográficos
Autores principales: Pommois, Romain, Furusawa, Gaku, Kosuge, Takuya, Yasunaga, Shun, Hanawa, Haruki, Takahashi, Hidetoshi, Kan, Tetsuo, Aoyama, Hisayuki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408251/
https://www.ncbi.nlm.nih.gov/pubmed/32629841
http://dx.doi.org/10.3390/mi11070647

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408251/
https://www.ncbi.nlm.nih.gov/pubmed/32629841
http://dx.doi.org/10.3390/mi11070647

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