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Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever
In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408251/ https://www.ncbi.nlm.nih.gov/pubmed/32629841 http://dx.doi.org/10.3390/mi11070647 |