Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity

In scanning laser projection systems, the laser modulation time is important for the projection resolution. The modulation time needs to be matched with the motion of the micromirror. For this paper, the piezoresistive sensor was integrated on the torsion beam of the micromirror to monitor the physi...

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Detalles Bibliográficos
Autores principales: Yu, Huijun, Zhou, Peng, Wang, Kewei, Huang, Yanfei, Shen, Wenjiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408515/
https://www.ncbi.nlm.nih.gov/pubmed/32629936
http://dx.doi.org/10.3390/mi11070651

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408515/
https://www.ncbi.nlm.nih.gov/pubmed/32629936
http://dx.doi.org/10.3390/mi11070651

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