Research Status and Development Trend of MEMS Switches: A Review

MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and sys...

Descripción completa

Detalles Bibliográficos
Autores principales: Cao, Tongtong, Hu, Tengjiang, Zhao, Yulong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408580/
https://www.ncbi.nlm.nih.gov/pubmed/32708999
http://dx.doi.org/10.3390/mi11070694

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408580/
https://www.ncbi.nlm.nih.gov/pubmed/32708999
http://dx.doi.org/10.3390/mi11070694

Ejemplares similares