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An Improved Passivity-based Control of Electrostatic MEMS Device
It is commonly known that the performance of an electrostatic microelectromechanical system (MEMS) device is limited to a specific range of the full gap distance due to the inherited “pull-in instability” phenomenon. In this work, we design a controller to extend the stabilization range of an electr...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408588/ https://www.ncbi.nlm.nih.gov/pubmed/32708638 http://dx.doi.org/10.3390/mi11070688 |