Chemical carving lithography with scanning catalytic probes

This study introduces a new chemical carving technique as an alternative to existing lithography and etching techniques. Chemical carving incorporates the concept of scanning probe lithography and metal-assisted chemical etching (MaCE). A catalyst-coated probe mechanically scans a Si substrate in a...

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Detalles Bibliográficos
Autores principales: Ki, Bugeun, Kim, Kyunghwan, Choi, Keorock, Oh, Jungwoo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7415144/
https://www.ncbi.nlm.nih.gov/pubmed/32770060
http://dx.doi.org/10.1038/s41598-020-70407-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7415144/
https://www.ncbi.nlm.nih.gov/pubmed/32770060
http://dx.doi.org/10.1038/s41598-020-70407-1

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