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Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution
[Image: see text] Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. H...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American
Chemical Society
2020
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7441496/ https://www.ncbi.nlm.nih.gov/pubmed/32851117 http://dx.doi.org/10.1021/acsphotonics.0c00701 |