Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution

[Image: see text] Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. H...

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Detalles Bibliográficos
Autores principales: Chien, Miao-Hsuan, Steurer, Johannes, Sadeghi, Pedram, Cazier, Nicolas, Schmid, Silvan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2020
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7441496/
https://www.ncbi.nlm.nih.gov/pubmed/32851117
http://dx.doi.org/10.1021/acsphotonics.0c00701

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7441496/
https://www.ncbi.nlm.nih.gov/pubmed/32851117
http://dx.doi.org/10.1021/acsphotonics.0c00701

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