Curvature-Modulated Si Spherical Cap-Like Structure Fabricated by Multistep Ring Edge Etching

To create approximately spherical structures with curved sidewalls, this paper presents a method for building a series of decreasing slopes along the sidewall of a circular truncated cone. The multistep ring-edge etching technology of first reducing the concentric mask and then cutting the top off t...

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Detalles Bibliográficos
Autores principales: Ma, Tieying, Wang, Jiachen, Li, Dabo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7463895/
https://www.ncbi.nlm.nih.gov/pubmed/32785149
http://dx.doi.org/10.3390/mi11080764

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7463895/
https://www.ncbi.nlm.nih.gov/pubmed/32785149
http://dx.doi.org/10.3390/mi11080764

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