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Curvature-Modulated Si Spherical Cap-Like Structure Fabricated by Multistep Ring Edge Etching
To create approximately spherical structures with curved sidewalls, this paper presents a method for building a series of decreasing slopes along the sidewall of a circular truncated cone. The multistep ring-edge etching technology of first reducing the concentric mask and then cutting the top off t...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7463895/ https://www.ncbi.nlm.nih.gov/pubmed/32785149 http://dx.doi.org/10.3390/mi11080764 |