Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication

Quartz is widely used in microelectromechanical systems (MEMS). Especially, MEMS quartz resonators are applied to sensors and serve as sensitive elements. The capability of deep etching is a limitation for the application. Presented in this paper is a deep and high accuracy reactive ion etching meth...

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Detalles Bibliográficos
Autores principales: Li, Bo, Li, Cun, Zhao, Yulong, Han, Chao, Zhang, Quanwei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7465086/
https://www.ncbi.nlm.nih.gov/pubmed/32722536
http://dx.doi.org/10.3390/mi11080724

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7465086/
https://www.ncbi.nlm.nih.gov/pubmed/32722536
http://dx.doi.org/10.3390/mi11080724

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