Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy

An extended version of cross-bar type addressing technique is developed for three-port electrostatic micro shutters arranged in an arrayed format. A microelectromechanical systems (MEMS) shutter blade suspended by a pair of torsion beams works as a movable electrode that is either attracted upwards...

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Detalles Bibliográficos
Autores principales: Liu, Xufeng, Takahashi, Takuya, Konishi, Masahiro, Motohara, Kentaro, Toshiyoshi, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7465729/
https://www.ncbi.nlm.nih.gov/pubmed/32824556
http://dx.doi.org/10.3390/mi11080782

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7465729/
https://www.ncbi.nlm.nih.gov/pubmed/32824556
http://dx.doi.org/10.3390/mi11080782

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