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Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy
An extended version of cross-bar type addressing technique is developed for three-port electrostatic micro shutters arranged in an arrayed format. A microelectromechanical systems (MEMS) shutter blade suspended by a pair of torsion beams works as a movable electrode that is either attracted upwards...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7465729/ https://www.ncbi.nlm.nih.gov/pubmed/32824556 http://dx.doi.org/10.3390/mi11080782 |