Effects of Anisotropy on Single Crystal Silicon in Polishing Non-Continuous Surface

A molecular dynamics model of the diamond abrasive polishing the single crystal silicon is established. Crystal surfaces of the single crystal silicon in the Y-direction are (010), (011), and (111) surfaces, respectively. The effects of crystallographic orientations on polishing the non-continuous s...

Descripción completa

Detalles Bibliográficos
Autores principales: Wang, Guilian, Feng, Zhijian, Hu, Yahui, Liu, Jie, Zheng, Qingchun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7466027/
https://www.ncbi.nlm.nih.gov/pubmed/32751578
http://dx.doi.org/10.3390/mi11080742

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7466027/
https://www.ncbi.nlm.nih.gov/pubmed/32751578
http://dx.doi.org/10.3390/mi11080742

Ejemplares similares