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Effects of Anisotropy on Single Crystal Silicon in Polishing Non-Continuous Surface
A molecular dynamics model of the diamond abrasive polishing the single crystal silicon is established. Crystal surfaces of the single crystal silicon in the Y-direction are (010), (011), and (111) surfaces, respectively. The effects of crystallographic orientations on polishing the non-continuous s...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7466027/ https://www.ncbi.nlm.nih.gov/pubmed/32751578 http://dx.doi.org/10.3390/mi11080742 |