Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition

Ammonia (NH(3))-assisted purification of deposits fabricated by focused electron beam-induced deposition (FEBID) has recently been proven successful for the removal of halide contaminations. Herein, we demonstrate the impact of combined NH(3) and electron processing on FEBID deposits containing hydr...

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Detalles Bibliográficos
Autores principales: Rohdenburg, Markus, Fröch, Johannes E., Martinović, Petra, Lobo, Charlene J., Swiderek, Petra
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7466110/
https://www.ncbi.nlm.nih.gov/pubmed/32806527
http://dx.doi.org/10.3390/mi11080769

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7466110/
https://www.ncbi.nlm.nih.gov/pubmed/32806527
http://dx.doi.org/10.3390/mi11080769

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