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Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope

Traditional MEMS gyroscope readout eliminates quadrature error and relies on the phase relationship between the drive displacement and the Coriolis position to accomplish a coherent demodulation. This scheme shows some risk, especially for a mode-matching gyro. If only a slight resonant frequency de...

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Detalles Bibliográficos
Autores principales: Chen, Hua, Zhong, Yanqing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7472230/
https://www.ncbi.nlm.nih.gov/pubmed/32823993
http://dx.doi.org/10.3390/s20164564