Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe(2))(3)) Based on FT-IR and QMS for Atomic Layer Deposition

We developed a newly designed system based on in situ monitoring with Fourier transform infrared (FT-IR) spectroscopy and quadrupole mass spectrometry (QMS) for understanding decomposition mechanism and by-products of vaporized Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe(2))(3)) during...

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Detalles Bibliográficos
Autores principales: An, Jong-Ki, Choi, Eunmi, Shim, Seob, Kim, Hayeong, Kang, Goru, Yun, Ju-Young
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2020
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7474051/
https://www.ncbi.nlm.nih.gov/pubmed/32886281
http://dx.doi.org/10.1186/s11671-020-03400-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7474051/
https://www.ncbi.nlm.nih.gov/pubmed/32886281
http://dx.doi.org/10.1186/s11671-020-03400-2

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