Design and Characterization of a Novel Biaxial Bionic Hair Flow Sensor Based on Resonant Sensing

This paper presents the design, theoretical analysis, simulation verification, fabrication and prototype characterization of a novel biaxial bionic hair flow sensor based on resonant sensing. Firstly, the device architecture, mainly consists of a polymer hair post, a silicon micro signal transducer...

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Detalles Bibliográficos
Autores principales: Liang, Zhuoyue, Guo, Xin, Yang, Bo, Zhang, Ting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7474428/
https://www.ncbi.nlm.nih.gov/pubmed/32796667
http://dx.doi.org/10.3390/s20164483

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7474428/
https://www.ncbi.nlm.nih.gov/pubmed/32796667
http://dx.doi.org/10.3390/s20164483

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