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Design and Characterization of a Novel Biaxial Bionic Hair Flow Sensor Based on Resonant Sensing
This paper presents the design, theoretical analysis, simulation verification, fabrication and prototype characterization of a novel biaxial bionic hair flow sensor based on resonant sensing. Firstly, the device architecture, mainly consists of a polymer hair post, a silicon micro signal transducer...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7474428/ https://www.ncbi.nlm.nih.gov/pubmed/32796667 http://dx.doi.org/10.3390/s20164483 |