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Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption

Zinc oxide films have been fabricated by the electron beam physical vapour deposition (PVD) technique. The effect of substrate temperature during fabrication and annealing temperature (carried out in ultra high vacuum conditions) has been investigated by means of atomic force microscopy, scanning el...

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Detalles Bibliográficos
Autores principales: Skowronski, Lukasz, Ciesielski, Arkadiusz, Olszewska, Aleksandra, Szczesny, Robert, Naparty, Mieczyslaw, Trzcinski, Marek, Bukaluk, Antoni
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7475817/
https://www.ncbi.nlm.nih.gov/pubmed/32784875
http://dx.doi.org/10.3390/ma13163510