Superhard Boron-Rich Boron Carbide with Controlled Degree of Crystallinity

Superhard boron-rich boron carbide coatings were deposited on silicon substrates by microwave plasma chemical vapor deposition (MPCVD) under controlled conditions, which led to either a disordered or crystalline structure, as measured by X-ray diffraction. The control of either disordered or crystal...

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Detalles Bibliográficos
Autores principales: Chakrabarty, Kallol, Chen, Wei-Chih, Baker, Paul A., Vijayan, Vineeth M., Chen, Cheng-Chien, Catledge, Shane A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7475823/
https://www.ncbi.nlm.nih.gov/pubmed/32824358
http://dx.doi.org/10.3390/ma13163622

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7475823/
https://www.ncbi.nlm.nih.gov/pubmed/32824358
http://dx.doi.org/10.3390/ma13163622

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