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Superhard Boron-Rich Boron Carbide with Controlled Degree of Crystallinity
Superhard boron-rich boron carbide coatings were deposited on silicon substrates by microwave plasma chemical vapor deposition (MPCVD) under controlled conditions, which led to either a disordered or crystalline structure, as measured by X-ray diffraction. The control of either disordered or crystal...
Autores principales: | Chakrabarty, Kallol, Chen, Wei-Chih, Baker, Paul A., Vijayan, Vineeth M., Chen, Cheng-Chien, Catledge, Shane A. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7475823/ https://www.ncbi.nlm.nih.gov/pubmed/32824358 http://dx.doi.org/10.3390/ma13163622 |
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