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Low-Temperature In-Induced Holes Formation in Native-SiO(x)/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires
The reduction of substrate temperature is important in view of the integration of III–V materials with a Si platform. Here, we show the way to significantly decrease substrate temperature by introducing a procedure to create nanoscale holes in the native-SiO(x) layer on Si(111) substrate via In-indu...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7475965/ https://www.ncbi.nlm.nih.gov/pubmed/32764363 http://dx.doi.org/10.3390/ma13163449 |
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author | R. Reznik, Rodion P. Kotlyar, Konstantin O. Gridchin, Vladislav V. Ubyivovk, Evgeniy V. Federov, Vladimir I. Khrebtov, Artem S. Shevchuk, Dmitrii E. Cirlin, George |
author_facet | R. Reznik, Rodion P. Kotlyar, Konstantin O. Gridchin, Vladislav V. Ubyivovk, Evgeniy V. Federov, Vladimir I. Khrebtov, Artem S. Shevchuk, Dmitrii E. Cirlin, George |
author_sort | R. Reznik, Rodion |
collection | PubMed |
description | The reduction of substrate temperature is important in view of the integration of III–V materials with a Si platform. Here, we show the way to significantly decrease substrate temperature by introducing a procedure to create nanoscale holes in the native-SiO(x) layer on Si(111) substrate via In-induced drilling. Using the fabricated template, we successfully grew self-catalyzed GaAs nanowires by molecular-beam epitaxy. Energy-dispersive X-ray analysis reveals no indium atoms inside the nanowires. This unambiguously manifests that the procedure proposed can be used for the growth of ultra-pure GaAs nanowires. |
format | Online Article Text |
id | pubmed-7475965 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-74759652020-09-09 Low-Temperature In-Induced Holes Formation in Native-SiO(x)/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires R. Reznik, Rodion P. Kotlyar, Konstantin O. Gridchin, Vladislav V. Ubyivovk, Evgeniy V. Federov, Vladimir I. Khrebtov, Artem S. Shevchuk, Dmitrii E. Cirlin, George Materials (Basel) Article The reduction of substrate temperature is important in view of the integration of III–V materials with a Si platform. Here, we show the way to significantly decrease substrate temperature by introducing a procedure to create nanoscale holes in the native-SiO(x) layer on Si(111) substrate via In-induced drilling. Using the fabricated template, we successfully grew self-catalyzed GaAs nanowires by molecular-beam epitaxy. Energy-dispersive X-ray analysis reveals no indium atoms inside the nanowires. This unambiguously manifests that the procedure proposed can be used for the growth of ultra-pure GaAs nanowires. MDPI 2020-08-05 /pmc/articles/PMC7475965/ /pubmed/32764363 http://dx.doi.org/10.3390/ma13163449 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article R. Reznik, Rodion P. Kotlyar, Konstantin O. Gridchin, Vladislav V. Ubyivovk, Evgeniy V. Federov, Vladimir I. Khrebtov, Artem S. Shevchuk, Dmitrii E. Cirlin, George Low-Temperature In-Induced Holes Formation in Native-SiO(x)/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires |
title | Low-Temperature In-Induced Holes Formation in Native-SiO(x)/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires |
title_full | Low-Temperature In-Induced Holes Formation in Native-SiO(x)/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires |
title_fullStr | Low-Temperature In-Induced Holes Formation in Native-SiO(x)/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires |
title_full_unstemmed | Low-Temperature In-Induced Holes Formation in Native-SiO(x)/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires |
title_short | Low-Temperature In-Induced Holes Formation in Native-SiO(x)/Si(111) Substrates for Self-Catalyzed MBE Growth of GaAs Nanowires |
title_sort | low-temperature in-induced holes formation in native-sio(x)/si(111) substrates for self-catalyzed mbe growth of gaas nanowires |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7475965/ https://www.ncbi.nlm.nih.gov/pubmed/32764363 http://dx.doi.org/10.3390/ma13163449 |
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