Effective silicon production from SiCl(4) source using hydrogen radicals generated and transported at atmospheric pressure

In the Siemens method, high-purity Si is produced by reducing SiHCl(3) source gas with H(2) ambient under atmospheric pressure. Since the pyrolysis of SiHCl(3), which produces SiCl(4) as a byproduct, occurs dominantly in the practical Siemens process, the Si yield is low (~30%). In the present study...

Descripción completa

Detalles Bibliográficos
Autores principales: Okamoto, Yuji, Sumiya, Masatomo, Nakamura, Yuya, Suzuki, Yoshikazu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2020
Materias:
Energy Materials
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7476485/
https://www.ncbi.nlm.nih.gov/pubmed/32939173
http://dx.doi.org/10.1080/14686996.2020.1789438

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7476485/
https://www.ncbi.nlm.nih.gov/pubmed/32939173
http://dx.doi.org/10.1080/14686996.2020.1789438

Ejemplares similares