Cargando…
Effective silicon production from SiCl(4) source using hydrogen radicals generated and transported at atmospheric pressure
In the Siemens method, high-purity Si is produced by reducing SiHCl(3) source gas with H(2) ambient under atmospheric pressure. Since the pyrolysis of SiHCl(3), which produces SiCl(4) as a byproduct, occurs dominantly in the practical Siemens process, the Si yield is low (~30%). In the present study...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Taylor & Francis
2020
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7476485/ https://www.ncbi.nlm.nih.gov/pubmed/32939173 http://dx.doi.org/10.1080/14686996.2020.1789438 |