An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multipar...

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Detalles Bibliográficos
Autores principales: Andany, Santiago H, Hlawacek, Gregor, Hummel, Stefan, Brillard, Charlène, Kangül, Mustafa, Fantner, Georg E
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2020
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7476598/
https://www.ncbi.nlm.nih.gov/pubmed/32953371
http://dx.doi.org/10.3762/bjnano.11.111

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7476598/
https://www.ncbi.nlm.nih.gov/pubmed/32953371
http://dx.doi.org/10.3762/bjnano.11.111

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