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An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization
In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multipar...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7476598/ https://www.ncbi.nlm.nih.gov/pubmed/32953371 http://dx.doi.org/10.3762/bjnano.11.111 |