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Calculation Theory of Nonuniform Distribution in Cleanroom
Due to the nonuniform distributions of airflow and dust particles, particles in cleanroom are actually not evenly distributed. This chapter will focus on the calculation theory of three-zone nonuniform distribution.
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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2013
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7498884/ http://dx.doi.org/10.1007/978-3-642-39374-7_11 |