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Characteristics of Cleanroom
Cleanroom shows different characteristics when it is in at-rest and operational states respectively, which is the reflection of its own laws. By further analysis, curve can be drawn with the expression of its particle concentration, through which the influence of every parameter on the air cleanline...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
2013
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7498918/ http://dx.doi.org/10.1007/978-3-642-39374-7_12 |