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Theory of Leakage Preventing Layer
It is a brand new concept for leakage prevention layer. The practice to place HEPA filter at the terminal is improved when the theory of leakage prevention layer applies, which becomes the core of novel air distribution method in cleanroom.
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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2013
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7498922/ http://dx.doi.org/10.1007/978-3-642-39374-7_15 |