Theory of Leakage Preventing Layer

It is a brand new concept for leakage prevention layer. The practice to place HEPA filter at the terminal is improved when the theory of leakage prevention layer applies, which becomes the core of novel air distribution method in cleanroom.

Detalles Bibliográficos
Autor principal: Xu, Zhonglin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7498922/
http://dx.doi.org/10.1007/978-3-642-39374-7_15
Descripción
Sumario:It is a brand new concept for leakage prevention layer. The practice to place HEPA filter at the terminal is improved when the theory of leakage prevention layer applies, which becomes the core of novel air distribution method in cleanroom.

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