Thin Diamond Film on Silicon Substrates for Pressure Sensor Fabrication

Thin polycrystalline diamond films chemically vapor deposited on thinned silicon substrates were used as membranes for pressure sensor fabrication by means of selective chemical etching of silicon. The sensing element is based on a simple low-finesse Fabry–Pérot (FP) interferometer. The FP cavity is...

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Detalles Bibliográficos
Autores principales: Salvatori, Stefano, Pettinato, Sara, Piccardi, Armando, Sedov, Vadim, Voronin, Alexey, Ralchenko, Victor
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7504279/
https://www.ncbi.nlm.nih.gov/pubmed/32825659
http://dx.doi.org/10.3390/ma13173697

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7504279/
https://www.ncbi.nlm.nih.gov/pubmed/32825659
http://dx.doi.org/10.3390/ma13173697

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