Characteristics Research of a High Sensitivity Piezoelectric MOSFET Acceleration Sensor

In order to improve the output sensitivity of the piezoelectric acceleration sensor, this paper proposed a high sensitivity acceleration sensor based on a piezoelectric metal oxide semiconductor field effect transistor (MOSFET). It is constituted by a piezoelectric beam and an N-channel depletion MO...

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Detalles Bibliográficos
Autores principales: Ai, Chunpeng, Zhao, Xiaofeng, Wen, Dianzhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506583/
https://www.ncbi.nlm.nih.gov/pubmed/32899161
http://dx.doi.org/10.3390/s20174988

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506583/
https://www.ncbi.nlm.nih.gov/pubmed/32899161
http://dx.doi.org/10.3390/s20174988

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