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Characteristics Research of a High Sensitivity Piezoelectric MOSFET Acceleration Sensor
In order to improve the output sensitivity of the piezoelectric acceleration sensor, this paper proposed a high sensitivity acceleration sensor based on a piezoelectric metal oxide semiconductor field effect transistor (MOSFET). It is constituted by a piezoelectric beam and an N-channel depletion MO...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506583/ https://www.ncbi.nlm.nih.gov/pubmed/32899161 http://dx.doi.org/10.3390/s20174988 |