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Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor

A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity o...

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Detalles Bibliográficos
Autores principales: Cheng, Xin, Dash, Jitendra Narayan, Gunawardena, Dinusha Serandi, Htein, Lin, Tam, Hwa-Yaw
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506645/
https://www.ncbi.nlm.nih.gov/pubmed/32878217
http://dx.doi.org/10.3390/s20174927