Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor

A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity o...

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Detalles Bibliográficos
Autores principales: Cheng, Xin, Dash, Jitendra Narayan, Gunawardena, Dinusha Serandi, Htein, Lin, Tam, Hwa-Yaw
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506645/
https://www.ncbi.nlm.nih.gov/pubmed/32878217
http://dx.doi.org/10.3390/s20174927
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author Cheng, Xin
Dash, Jitendra Narayan
Gunawardena, Dinusha Serandi
Htein, Lin
Tam, Hwa-Yaw
author_facet Cheng, Xin
Dash, Jitendra Narayan
Gunawardena, Dinusha Serandi
Htein, Lin
Tam, Hwa-Yaw
author_sort Cheng, Xin
collection PubMed
description A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/°C.
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spelling pubmed-75066452020-09-26 Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor Cheng, Xin Dash, Jitendra Narayan Gunawardena, Dinusha Serandi Htein, Lin Tam, Hwa-Yaw Sensors (Basel) Letter A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/°C. MDPI 2020-08-31 /pmc/articles/PMC7506645/ /pubmed/32878217 http://dx.doi.org/10.3390/s20174927 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Letter
Cheng, Xin
Dash, Jitendra Narayan
Gunawardena, Dinusha Serandi
Htein, Lin
Tam, Hwa-Yaw
Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_full Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_fullStr Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_full_unstemmed Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_short Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_sort silicone rubber based highly sensitive fiber-optic fabry–perot interferometric gas pressure sensor
topic Letter
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506645/
https://www.ncbi.nlm.nih.gov/pubmed/32878217
http://dx.doi.org/10.3390/s20174927
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