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Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity o...
Autores principales: | Cheng, Xin, Dash, Jitendra Narayan, Gunawardena, Dinusha Serandi, Htein, Lin, Tam, Hwa-Yaw |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506645/ https://www.ncbi.nlm.nih.gov/pubmed/32878217 http://dx.doi.org/10.3390/s20174927 |
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