Design, Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure

The design, analysis, and simulation of a new Micro-electromechanical System (MEMS) gyroscope based on differential tunneling magnetoresistance sensing are presented in this paper. The device is driven by electrostatic force, whereas the Coriolis displacements are transferred to intensity variations...

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Detalles Bibliográficos
Autores principales: Li, Cheng, Yang, Bo, Guo, Xin, Chen, Xinru
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506688/
https://www.ncbi.nlm.nih.gov/pubmed/32878100
http://dx.doi.org/10.3390/s20174919

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506688/
https://www.ncbi.nlm.nih.gov/pubmed/32878100
http://dx.doi.org/10.3390/s20174919

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