Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...

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Detalles Bibliográficos
Autores principales: Perello-Roig, Rafel, Verd, Jaume, Bota, Sebastià, Segura, Jaume
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506693/
https://www.ncbi.nlm.nih.gov/pubmed/32824963
http://dx.doi.org/10.3390/s20174663

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506693/
https://www.ncbi.nlm.nih.gov/pubmed/32824963
http://dx.doi.org/10.3390/s20174663

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