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Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...

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Detalles Bibliográficos
Autores principales:	Perello-Roig, Rafel, Verd, Jaume, Bota, Sebastià, Segura, Jaume
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506693/ https://www.ncbi.nlm.nih.gov/pubmed/32824963 http://dx.doi.org/10.3390/s20174663

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