Porous Silicon Gas Sensors: The Role of the Layer Thickness and the Silicon Conductivity

We studied the influences of the thickness of the porous silicon layer and the conductivity type on the porous silicon sensors response when exposed to ethanol vapor. The response was determined at room temperature (27 [Formula: see text] C) in darkness using a horizontal aluminum electrode pattern....

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Detalles Bibliográficos
Autores principales: Ramírez-González, Francisco, García-Salgado, Godofredo, Rosendo, Enrique, Díaz, Tomás, Nieto-Caballero, Fabiola, Coyopol, Antonio, Romano, Román, Luna, Alberto, Monfil, Karim, Gastellou, Erick
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506701/
https://www.ncbi.nlm.nih.gov/pubmed/32882835
http://dx.doi.org/10.3390/s20174942

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506701/
https://www.ncbi.nlm.nih.gov/pubmed/32882835
http://dx.doi.org/10.3390/s20174942

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