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Porous Silicon Gas Sensors: The Role of the Layer Thickness and the Silicon Conductivity
We studied the influences of the thickness of the porous silicon layer and the conductivity type on the porous silicon sensors response when exposed to ethanol vapor. The response was determined at room temperature (27 [Formula: see text] C) in darkness using a horizontal aluminum electrode pattern....
| Autores principales: | , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506701/ https://www.ncbi.nlm.nih.gov/pubmed/32882835 http://dx.doi.org/10.3390/s20174942 |