Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review

Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise performance and fabrication compatibility with ma...

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Detalles Bibliográficos
Autores principales: Tu, Cheng, Lee, Joshua E.-Y., Zhang, Xiao-Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506750/
https://www.ncbi.nlm.nih.gov/pubmed/32887409
http://dx.doi.org/10.3390/s20174978

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506750/
https://www.ncbi.nlm.nih.gov/pubmed/32887409
http://dx.doi.org/10.3390/s20174978

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