Cargando…

Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review

Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise performance and fabrication compatibility with ma...

Descripción completa

Detalles Bibliográficos
Autores principales: Tu, Cheng, Lee, Joshua E.-Y., Zhang, Xiao-Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506750/
https://www.ncbi.nlm.nih.gov/pubmed/32887409
http://dx.doi.org/10.3390/s20174978