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ZnO ALD-Coated Microsphere-Based Sensors for Temperature Measurements

In this paper, the application of a microsphere-based fiber-optic sensor with a 200 nm zinc oxide (ZnO) coating, deposited by the Atomic Layer Deposition (ALD) method, for temperature measurements between 100 and 300 °C, is presented. The main advantage of integrating a fiber-optic microsphere with...

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Detalles Bibliográficos
Autores principales: Listewnik, Paulina, Bechelany, Mikhael, Jasinski, Jacek B., Szczerska, Małgorzata
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7506751/
https://www.ncbi.nlm.nih.gov/pubmed/32825233
http://dx.doi.org/10.3390/s20174689