Integration of Single Oriented Oxide Superlattices on Silicon Using Various Template Techniques

[Image: see text] To benefit from the diverse functionalities of perovskite oxides in silicon-based complementary metal oxide semiconductor (CMOS) technology, integrating oxides into a silicon platform has become one of the major tasks for oxide research. Using the deposition of LaMnO(3)/SrTiO(3) (S...

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Detalles Bibliográficos
Autores principales: Chen, Binbin, Jovanovic, Zoran, Abel, Stefan, Le, Phu Tran Phong, Halisdemir, Ufuk, Smithers, Mark, Diaz-Fernandez, Daniel, Spreitzer, Matjaž, Fompeyrine, Jean, Rijnders, Guus, Koster, Gertjan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2020
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7517711/
https://www.ncbi.nlm.nih.gov/pubmed/32842731
http://dx.doi.org/10.1021/acsami.0c10579

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7517711/
https://www.ncbi.nlm.nih.gov/pubmed/32842731
http://dx.doi.org/10.1021/acsami.0c10579

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