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Integration of Single Oriented Oxide Superlattices on Silicon Using Various Template Techniques
[Image: see text] To benefit from the diverse functionalities of perovskite oxides in silicon-based complementary metal oxide semiconductor (CMOS) technology, integrating oxides into a silicon platform has become one of the major tasks for oxide research. Using the deposition of LaMnO(3)/SrTiO(3) (S...
| Autores principales: | , , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American
Chemical Society
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7517711/ https://www.ncbi.nlm.nih.gov/pubmed/32842731 http://dx.doi.org/10.1021/acsami.0c10579 |