High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference

Micro-electro-mechanical system (MEMS) gyroscopes have numerous potential applications including guidance, robotics, tactical-grade navigation, and automotive applications fields. The methods with ability of the weak Coriolis force detection are critical for MEMS gyroscopes. In this paper, we presen...

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Detalles Bibliográficos
Autores principales: Jin, Li, Qin, Shi-Yang, Zhang, Rui, Li, Meng-Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7536292/
https://www.ncbi.nlm.nih.gov/pubmed/33020557
http://dx.doi.org/10.1038/s41598-020-73369-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7536292/
https://www.ncbi.nlm.nih.gov/pubmed/33020557
http://dx.doi.org/10.1038/s41598-020-73369-6

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